Quarzglasrohr für Fab IR Lampe

Wed, 10 Jun 2026 01:45:40 +0800

Out on the fab floor, you know the drill. A soft bake at 90°C that drifts even half a degree throws off the photoresist profile and eats away at CD control. That quartz sleeve around the IR lamp isn’t just a cover—it’s the thermal interface that locks in repeatability for every bake step. What matters under the hood We spec these sleeves for short-wave and medium-wave IR lamps, matching the spectrum you need for fast, uniform wafer heating. The material is high-purity fused quartz, chosen for strong NIR transmission and low outgassing in Class 1–100 cleanrooms. The target is wafer-level thermal uniformity of ±0.1°C across the bake surface—keeps line-width variation tight and cuts down rework. Geometry is held to tight tolerances so the lamp stays dead-center on-axis, which keeps hot spots from showing up. You can plan on 5,000+ hours of stable output with less than 5% drop, and the design keeps particle generation near zero even as you cycle through thermal profiles. Why it plays in lithography On the lithography tracks, the sleeve gives you predictable soft bake and hard bake profiles—protects yield and keeps scrap low. That stable temperature curve shortens process settling time, which trims cycle time per lot. Energy use comes down because the lamp hits setpoint fast and holds it without overshoot. Fewer parameter excursions, fewer equipment alarms, and less unplanned downtime. And as a verified equivalent, the sleeve lines up with international semiconductor equipment standards, dropping straight into existing OEM fixtures without re-qualifying the whole module. The practical details Installation means strict lamp alignment and hitting the right torque on the mounting hardware—misalignment tilts the thermal axis and hurts uniformity. Double-check the lamp end-of-life detection settings so output drift doesn’t get masked. Handle the sleeve with cleanroom-compliant gloves; surface films can absorb IR and skew temperature. Tie replacement intervals to your preventive maintenance schedule so the process window stays stable.

Quarz Elektroheizer

Thu, 28 May 2026 23:35:48 +0800

Wenn Sie unbedingt Wärme benötigen und diese sofort brauchen, sind diese Quarz-Elektroheizer die passende Lösung. Sie sind für Situationen ausgelegt, in denen schnelle, intensive Strahlungswärme nicht nur wünschenswert, sondern der eigentliche Zweck ist.

Details im Überblick

Es handelt sich um eine Leistung von 2500W, die üblicherweise mit 400V betrieben wird. Die hohe Spannung ist eine sinnvolle Wahl. Sie hält den Stromfluss im Rahmen, sodass kein massives Kabelquerschnitt benötigt wird und Spannungsabfälle in der Zuleitung minimiert werden. Die Länge von 300mm ermöglicht es, diese Leistung auf engem Raum zu konzentrieren. So entsteht eine hohe Leistungsdichte, ohne dass die Maschine insgesamt größer gebaut werden muss.

Quarz on Patio Infrared Heating Masters

Quarzglasrohr für Fab IR Lampe

Quarz Elektroheizer

Details im Überblick