Below you will find pages that utilize the taxonomy term “Sleeve” Quartz sleeve for fab IR lamp Out on the fab floor, you know the drill. A soft bake at 90°C that drifts even half a degree throws off the photoresist profile and eats away at CD... Read more...
Quartz sleeve for fab IR lamp Out on the fab floor, you know the drill. A soft bake at 90°C that drifts even half a degree throws off the photoresist profile and eats away at CD... Read more...